Microelectromagnetic energy harvester with integrated magnets

Author

Zhang, Q. ; Chen, S.J. ; Baumgartel, L. ; Lin, A. ; Kim, E.S.

Author_Institution

Dept. of Electr. Eng., Univ. of Southern California, Los Angeles, CA, USA

fYear

2011

fDate

5-9 June 2011

Firstpage

1657

Lastpage

1660

Abstract

This paper presents a microelectromagnetic power generator with integrated magnets that can be fabricated on silicon wafers in a batch process. The generator is fabricated by MEMS technologies and characterized at different vibration frequencies, amplitudes and load resistances. This compact generator occupies a volume of 15×13×0.4mm³, as no external permanent magnets are needed. Experimental results show that with a 20-turn spiral coil, the device can generate an induced electromotive force (EMF) of 0.27mV at a vibration frequency and amplitude of 350Hz and 10μm, respectively.

Keywords

electric potential; energy harvesting; magnets; microfabrication; micromechanical devices; vibrations; 20-turn spiral coil; EMF; MEMS technology; frequency 350 Hz; induced electromotive force; integrated magnets; microelectromagnetic energy harvester; microelectromagnetic power generator; size 10 mum; vibration frequency; voltage 0.27 mV; Coils; Electromagnetics; Frequency measurement; Generators; Magnetic flux; Powders; Vibrations; Energy harvester; integrated magnets; microelectromagnetic power generator;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969859

Filename

5969859