DocumentCode
254329
Title
Fabrication and characterization of uniform conformal thin films of SiO2 and SiNx on optical fibers
Author
Green, M. ; Naqvi, Z. ; Smith, K. ; Tsing-Hua Her
Author_Institution
Dept. of Phys. & Opt. Sci., UNC Charlotte, Charlotte, NC, USA
fYear
2014
fDate
15-17 Dec. 2014
Firstpage
229
Lastpage
233
Abstract
This paper reports the fabrication and characterization of uniform conformal dielectric thin films on optical fibers using plasma-enhanced chemical vapor deposition. We show convincingly that, using both iridescence and scanning electron microscopy, uniform deposition on the fiber can only be obtained if it is rotated at a constant speed during deposition. Our study is important for depositing single or multiple uniform dielectric thin films on objects with cylindrical or spherical symmetry, which could enable new optical functionalities.
Keywords
dielectric thin films; infrared spectra; optical fibres; plasma CVD; scanning electron microscopy; silicon compounds; visible spectra; SiNx; SiO2; cylindrical symmetry; iridescence; optical fibers; optical functionalities; plasma-enhanced chemical vapor deposition; scanning electron microscopy; spherical symmetry; uniform conformal dielectric thin films; uniform conformal thin films; uniform deposition; Integrated optics; Optical fiber polarization; Optical fiber testing; Optical films; Optical polarization; Optical Fibers; Photonic Crystals; Thin Films;
fLanguage
English
Publisher
ieee
Conference_Titel
High-capacity Optical Networks and Emerging/Enabling Technologies (HONET), 2014 11th Annual
Conference_Location
Charlotte, NC
Print_ISBN
978-1-4799-6939-5
Type
conf
DOI
10.1109/HONET.2014.7029398
Filename
7029398
Link To Document