Research on semiconductor wafer fabrication´s hot lots problem

Author

Sheng-Liang, Xu ; Hui-Min, Ma ; Zhong-Lin, Huang

Author_Institution

Economic Manage. Sch., Shanghai Dianji Univ., Shanghai, China

fYear

2009

fDate

21-23 Oct. 2009

Firstpage

2131

Lastpage

2135

Abstract

In this paper the hot lots problem on semiconductor wafer fabrication is studied. Corresponding mathematical model whose object is to minimize the total cost of produce and transport is made. The method based on Binary Particle Swarm Optimization algorithm is proposed to solve this problem. The detailed realization of the method is illustrated, and an example is presented, the simulation results compared to solved by lingo software proves that the BPSO method is effective and stable.

Keywords

particle swarm optimisation; production planning; semiconductor device manufacture; binary particle swarm optimization algorithm; cost minimization; hot lots problem; semiconductor wafer fabrication; Analytical models; Costs; Educational products; Educational programs; Fabrication; Mathematical model; Particle swarm optimization; Production planning; Pulp manufacturing; Semiconductor device manufacture; Binary Particle Swarm Optimization Algorithm; Hot lots problem; Semiconductor wafer fabrication;

fLanguage

English

Publisher

ieee

Conference_Titel

Industrial Engineering and Engineering Management, 2009. IE&EM '09. 16th International Conference on

Conference_Location

Beijing

Print_ISBN

978-1-4244-3671-2

Electronic_ISBN

978-1-4244-3672-9

Type

conf

DOI

10.1109/ICIEEM.2009.5344225

Filename

5344225