• DocumentCode
    2549564
  • Title

    Parameter extraction for tunable TFBARs based on BaxSr1−xTiO3

  • Author

    Norling, Martin ; Berge, John ; Gevorgian, Spartak

  • Author_Institution
    Phys. Electron. Lab., Chalmers Univ. of Technol., Goteborg, Sweden
  • fYear
    2009
  • fDate
    7-12 June 2009
  • Firstpage
    101
  • Lastpage
    104
  • Abstract
    A model and a robust extraction procedure for tunable thin-film bulk acoustic resonators (TFBARs) are proposed. The TFBARs are based on induced piezoelectricity in BaxSr1-xTiO3 films. Their tunable characteristics as represented by the extracted model parameters are interpreted and discussed.
  • Keywords
    acoustic resonators; bulk acoustic wave devices; crystal resonators; BaxSr1-xTiO3; induced piezoelectricity; tunable TFBAR; tunable thin film bulk acoustic resonator; Dielectric losses; Electrodes; Ferroelectric films; Film bulk acoustic resonators; Gold; Optical films; Parameter extraction; Piezoelectric films; Piezoelectricity; Tunable circuits and devices; Model extraction; ferroelectric; piezoelectric; tunable TFBAR; tunable thin-film bulk acoustic resonator;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Symposium Digest, 2009. MTT '09. IEEE MTT-S International
  • Conference_Location
    Boston, MA
  • ISSN
    0149-645X
  • Print_ISBN
    978-1-4244-2803-8
  • Electronic_ISBN
    0149-645X
  • Type

    conf

  • DOI
    10.1109/MWSYM.2009.5165642
  • Filename
    5165642
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2549564