DocumentCode
2553770
Title
Design of a micromechanical system utilizing hydrogel force for controlling a microvalve
Author
Tehranirokh, Masoomeh ; Majlis, Burhanuddin Yeop ; Bais, Badariah
Author_Institution
Inst. of Microengineering & Nanoelectron. (IMEN), Univ. Kebangsaan Malaysia, Bangi
fYear
2008
fDate
25-27 Nov. 2008
Firstpage
179
Lastpage
183
Abstract
A hydrogel actuated microsystem employed in controlling the opening-closing states of a microvalve is described. This microsystem consists of a flexible silicone rubber diaphragm with an attached silicon boss and a cantilever beam. Swelling of the hydrogel forces the bossed membrane and consequently the cantilever beam to be deflected. Simulations were done by FEM analysis and the results show enough deflections to open the valve and let the fluid flow through the microvalve.
Keywords
beams (structures); cantilevers; finite element analysis; hydrogels; microvalves; FEM analysis; cantilever beam; flexible silicone rubber diaphragm; hydrogel force; micromechanical system; microsystem; microvalve; Analytical models; Biomembranes; Control systems; Force control; Micromechanical devices; Microvalves; Rubber; Silicon; Structural beams; Valves;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Electronics, 2008. ICSE 2008. IEEE International Conference on
Conference_Location
Johor Bahru
Print_ISBN
978-1-4244-3873-0
Electronic_ISBN
978-1-4244-2561-7
Type
conf
DOI
10.1109/SMELEC.2008.4770303
Filename
4770303
Link To Document