DocumentCode
2556847
Title
Integration of high-Q resonators with MCM-D for millimeter wave applications
Author
Ocket, I. ; Nauwelaers, B. ; Carchon, G. ; De Raedt, W.
Volume
2
fYear
2005
fDate
25-28 July 2005
Firstpage
83
Lastpage
86
Keywords
Automotive engineering; Cavity resonators; Copper; Costs; Feeds; Microwave technology; Millimeter wave radar; Millimeter wave technology; Silicon; Wet etching;
fLanguage
English
Publisher
ieee
Conference_Titel
Research in Microelectronics and Electronics, 2005 PhD
Print_ISBN
0-7803-9345-7
Type
conf
DOI
10.1109/RME.2005.1542942
Filename
1542942
Link To Document