DocumentCode
2558621
Title
Charging acceleration in dielectric less RF MEMS switched varactors under CW microwave power
Author
Mardivirin, D. ; Pothier, A. ; Orlianges, J.C. ; Crunteanu, A. ; Blondy, P.
Author_Institution
CNRS, Univ. de Limoges, Limoges, France
fYear
2009
fDate
7-12 June 2009
Firstpage
1649
Lastpage
1652
Abstract
The effect of microwave power on charging of dielectric less switches is presented and related to temperature elevation. We demonstrate operation under 6.3 Watts CW operation and an estimation of the switch temperature under 50% duty cycle bipolar bias. It is shown that the switch is following accelerated charging with similar time evolution than under low power, and that the switch temperature reaches about 60degC under 6.3 W CW of applied microwave signal.
Keywords
microswitches; varactors; CW microwave power; charging acceleration; dielectric less RF MEMS switched varactors; power 6.3 W; Acceleration; Dielectrics; Microwave devices; Radiofrequency microelectromechanical systems; Silicon; Switches; Temperature; Testing; Varactors; Voltage; RF-MEMS; charging; power handling; reliability;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Symposium Digest, 2009. MTT '09. IEEE MTT-S International
Conference_Location
Boston, MA
ISSN
0149-645X
Print_ISBN
978-1-4244-2803-8
Electronic_ISBN
0149-645X
Type
conf
DOI
10.1109/MWSYM.2009.5166030
Filename
5166030
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