Just-in-time AMHS delivery for 300 mm FAB

Author

Chang, Jonathan ; Cheng, Yung

Author_Institution

Inst. of Manuf. Eng., Nat. Cheng Kung Univ., Tainan, Taiwan

fYear

2004

fDate

9-10 Sept. 2004

Firstpage

25

Lastpage

28

Abstract

When investing high cost to setup a 300 mm FAB transportation automation (3% of overall 300 mm FAB capital according to ITRS 2003), we always review the performance and KPl of this huge investment to make sure that the investment could gain sufficient ROI (return of investment) from 300 mm FAB automation operation productivity. When we are approaching ITRS´s AMHS matrix - average FAB wide transportation should be 8 minutes; maximum FAB wide FOUP transportation should be 15 minutes. We found that just-in-time integrated system design could easily gain more 300 mm full-automation productivity than expensive AMHS investment.

Keywords

goods distribution; investment; just-in-time; materials handling; semiconductor device manufacture; semiconductor technology; 15 min; 300 mm; 300 mm FAB automation operation productivity; 300 mm FAB transportation automation; 8 min; AMHS matrix; automated material handling system; just-in-time integrated system design; return of investment; Buffer storage; Costs; Dispatching; Investments; Manufacturing automation; Performance gain; Production facilities; Production systems; Productivity; Transportation;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing Technology Workshop Proceedings, 2004

Print_ISBN

0-7803-8469-5

Type

conf

DOI

10.1109/SMTW.2004.1393706

Filename

1393706