DocumentCode
2558985
Title
Considerations for cleanroom control in different climatic regions
Author
Tsai, Chun-Hung ; Chung, Kung-Yao ; Wang, Chun-Mine
Author_Institution
United Microelectron. Corp., Hsinchu, Taiwan
fYear
2004
fDate
9-10 Sept. 2004
Firstpage
59
Lastpage
62
Abstract
The cleanroom control systems should be designed according to different climatic regions. This work investigates how the climatic difference affects the design of the make-up-air unit, MAU, which controls temperature and humidity in a cleanroom. We recommend suitable designs for different climatic regions around the world. We also establish a database for MAU design of different climatic regions.
Keywords
clean rooms; control engineering computing; control system synthesis; database management systems; design engineering; humidity control; semiconductor device manufacture; temperature control; cleanroom control systems; climatic regions; humidity control; make-up-air unit; temperature control; Cities and towns; Coils; Databases; Humans; Humidity control; Moisture; Spraying; Temperature control; Water heating; Water pollution;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing Technology Workshop Proceedings, 2004
Print_ISBN
0-7803-8469-5
Type
conf
DOI
10.1109/SMTW.2004.1393718
Filename
1393718
Link To Document