Global models for the microwave driven double icp plasma jet

Summary form only given. For many technical applications, microwave driven plasma jets are possible alternatives to conventional RF plasma sources. They are of uncomplicated construction, and have the advantages of small size and large electrical efficiency. The contribution will present two models of the configuration. An “ignition model” assumes an unperturbed vacuum field and allows studying the ignition of the device. A complementary “operation model” is based on an approximate representation of the field as modified by the plasma and describes the jet in stationary operation. For both models, a comparison of the simulation results with experimental data is performed.