• DocumentCode
    2568621
  • Title

    A 4.5mW Closed-Loop /spl Delta//spl Sigma/ Micro-Gravity CMOS-SOI Accelerometer

  • Author

    Babak Vakili Amini ; Reza Abdolvand ; Farrokh Ayazi

  • Author_Institution
    Georgia Inst. of Technol., Atlanta, GA
  • fYear
    2006
  • fDate
    6-9 Feb. 2006
  • Firstpage
    1101
  • Lastpage
    1110
  • Abstract
    A force-rebalanced high-order DeltaSigma micro-g accelerometer has been implemented in CMOS-SOI. The measured acceleration resolution is 4mug/radicHz, which is equivalent to a capacitive resolution of 2aF with a dynamic range of 95dB at 20Hz (resolution BW=3Hz). Measured sensitivity is 5pF/g (gain of 30V/g). The IC consumes 4.5mW from a 3V supply and uses 2.25mm2
  • Keywords
    CMOS integrated circuits; accelerometers; delta-sigma modulation; silicon-on-insulator; 3 V; 4.5 mW; acceleration resolution; closed-loop DeltaSigma accelerometer; force-rebalanced; micro-gravity CMOS-SOI accelerometer; Acceleration; Accelerometers; Application software; Dynamic range; Force feedback; Gravity; Integrated circuit noise; Noise measurement; Portable computers; Vibration measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Circuits Conference, 2006. ISSCC 2006. Digest of Technical Papers. IEEE International
  • Conference_Location
    San Francisco, CA
  • ISSN
    0193-6530
  • Print_ISBN
    1-4244-0079-1
  • Type

    conf

  • DOI
    10.1109/ISSCC.2006.1696155
  • Filename
    1696155
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2568621