Nonlocal Electron Kinetics in High-Frequency Capacitive Discharges

Summary form only given. Several phenomena associated with nonlocal electron kinetics are found in high-frequency capacitive discharges through particle-in-cell/Monte Carlo simulations. From the spatial profile of the electron power deposition, the negative RF power deposition is analyzed for different excitation frequencies. The non-monotonic structure of RF electric field which comes from the abrupt phase reversal of RF electric field is found. From the separate calculations for low-and high-energy electron groups, the second layer in high-energy electron current is also observed