DocumentCode
2571225
Title
Commercialization of optical MEMS-volume manufacturing approaches
Author
Markus, Karen W.
Author_Institution
JDS Uniphase Co., Research Triangle Park, NC, USA
fYear
2000
fDate
2000
Firstpage
7
Lastpage
8
Abstract
This presentation addresses the main challenges facing the growth of optical MEMS volume manufacturing. The different process technologies and their interplay with the different classes of optical MEMS devices are presented. In addition, the challenges of establishing a manufacturing operation that can support the stringent requirements of Telecordia qualification are also discussed
Keywords
attenuators; equalisers; micro-optics; micromachining; mirrors; optical fabrication; optical interconnections; optical switches; photolithography; semiconductor device manufacture; sputter etching; Telecordia qualification requirements; equalizers; micromachining; mirrors; optical MEMS commercialization; optical cross-connects; process technologies; switches; variable optical attenuators; volume manufacturing approaches; wafer-scale projection lithography; Commercialization; Large-scale systems; Manufacturing; Material properties; Micromechanical devices; Mirrors; Optical attenuators; Optical devices; Optical sensors; Surface topography;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS, 2000 IEEE/LEOS International Conference on
Conference_Location
Kauai, HI
Print_ISBN
0-7803-6257-8
Type
conf
DOI
10.1109/OMEMS.2000.879601
Filename
879601
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