Microelectromechanical intersecting waveguide optical switch based on thermo-capillarity

Author

Makihara, Mitsuhiro

Author_Institution

NTT Telecommun. Energy Lab., Kanagawa, Japan

fYear

2000

fDate

2000

Firstpage

33

Lastpage

34

Abstract

Space-division optical switches are essential for realizing the optical cross-connects and protection switches needed in future fiber-optic communication networks. Optical switches fabricated with MEMS technology are strongly anticipated; their excellent optical characteristics are due to their use of micromirrors to redirect optical signals. MEMS optical switches are roughly divided into two types: free-space and waveguide. This paper describes an intersecting waveguide optical switch based on thermo-capillarity

Keywords

capillarity; micro-optics; micromachining; mirrors; optical communication equipment; optical fabrication; optical planar waveguides; optical switches; sputter etching; thermo-optical effects; MEMS optical switch; RIE; anodic bonding; insertion loss; intersecting waveguide optical switch; matrix switch; microheater; optical line terminal; reserved optical subscriber unit; selector switch; self-latching switch; slit fabrication; space-division optical switches; thermo-capillarity; Communication networks; Communication switching; Micromechanical devices; Micromirrors; Optical fiber communication; Optical fiber networks; Optical switches; Optical waveguides; Protection; Space technology;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS, 2000 IEEE/LEOS International Conference on

Conference_Location

Kauai, HI

Print_ISBN

0-7803-6257-8

Type

conf

DOI

10.1109/OMEMS.2000.879613

Filename

879613