• DocumentCode
    2572189
  • Title

    Microfabricated solid immersion lens with metal aperture

  • Author

    Fletcher, Daniel A. ; Simanovskii, Dmitrii ; Palanker, Daniel ; Crozier, Kenneth B. ; Quate, Calvin F. ; Kino, Gordon S. ; Goodson, Kenneth E.

  • Author_Institution
    Edward L. Ginzton Lab., Stanford Univ., CA, USA
  • fYear
    2000
  • fDate
    2000
  • Firstpage
    133
  • Lastpage
    134
  • Abstract
    We demonstrate spatial resolution better than λ/10 in the infrared with a transmittance of 10-3 using a microfabricated solid immersion lens and metal aperture
  • Keywords
    microlenses; micromachining; near-field scanning optical microscopy; optical fabrication; optical resolving power; silicon-on-insulator; IR transmittance; SOI wafer; Si; Si-SiO2; anodic bonding; imaging capability; metal aperture; microfabricated solid immersion lens; selective RIE; solid immersion microscopy; spatial resolution; Apertures; Focusing; Lenses; Optical films; Optical microscopy; Optical refraction; Optical variables control; Solids; Spatial resolution; Throughput;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS, 2000 IEEE/LEOS International Conference on
  • Conference_Location
    Kauai, HI
  • Print_ISBN
    0-7803-6257-8
  • Type

    conf

  • DOI
    10.1109/OMEMS.2000.879661
  • Filename
    879661
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2572189