Extending the travel range of electrostatic micro-mirrors using insulator coated electrodes

Author

Wu, Xing-tao ; Brown, Richard A. ; Mathews, Smitha ; Farmer, K.R.

fYear

2000

fDate

2000

Firstpage

151

Lastpage

152

Keywords

Capacitance; Electrodes; Electrostatics; Equations; Insulation; Mirrors; Optical attenuators; Silicon compounds; Springs; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS, 2000 IEEE/LEOS International Conference on

Print_ISBN

0-7803-6257-8

Type

DOI

10.1109/OMEMS.2000.879670

Filename

879670

Link To Document