A singular perturbation analysis and control of a new nanomanipulator

Recently, we proposed a new probe suitable for fabrication and manipulation at the nanoscale. The proposed design possesses three axis actuation and sensing capabilities. In addition, it can be incorporated into atomic force microscopes to turn them into reliable nanomanipulators. In the present paper, we use singular perturbation analysis techniques to develop a suitable control strategy of the probe motion. A fast control is used to eliminate undesired oscillations of the tip-holder whereas slow control is employed to reduce tip positioning errors. Path tracking simulations are conducted to validate the proposed control strategy. In addition, effects of stick-slip disturbances on the probe performance are investigated.