• DocumentCode
    2576719
  • Title

    Structured Design Of Microelectromechanical Systems

  • Author

    Mukherjee, Tamal ; Fedder, Gary K.

  • Author_Institution
    Carnegie Mellon University Pittsburgh, PA, 15213-3890
  • fYear
    1997
  • fDate
    9-13 June 1997
  • Firstpage
    680
  • Lastpage
    685
  • Keywords
    Actuators; Design automation; Electromechanical sensors; Fabrication; Mechanical sensors; Microelectromechanical systems; Micromechanical devices; Optical resonators; Sensor systems; Topology;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Design Automation Conference, 1997. Proceedings of the 34th
  • Conference_Location
    Anaheim, CA, USA
  • ISSN
    0738-100X
  • Print_ISBN
    0-7803-4093-0
  • Type

    conf

  • DOI
    10.1109/DAC.1997.597231
  • Filename
    597231
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2576719