• DocumentCode
    2576974
  • Title

    Patterning of photonic quasi-crystals on GaN LEDs

  • Author

    Khokhar, Ali Z. ; Macintyre, Douglas S. ; Rahman, Faiz ; De La Rue, Richard M. ; Johnson, Nigel P. ; Charlton, Martin ; Watson, Ian M. ; Xiong, Chang ; Kelm, Pawel ; Zhang, Haoxiang ; Gu, Erdan ; Dawson, Martin D.

  • Author_Institution
    Dept. of Electron. & Electr. Eng., Univ. of Glasgow, Glasgow
  • fYear
    2009
  • fDate
    12-14 Jan. 2009
  • Firstpage
    56
  • Lastpage
    57
  • Abstract
    The fabrication of 2-dimensional (2D) photonic quasi crystals (PQCs) on gallium nitride (GaN) light emitting diodes (LEDs) is described. Fabrication was achieved using electron beam lithography (EBL) and, separately, by nano-imprint lithography (NIL).
  • Keywords
    III-V semiconductors; electron beam lithography; gallium compounds; light emitting diodes; nanolithography; nanopatterning; photonic crystals; 2D photonic quasicrystals; LEDs; electron beam lithography; epitaxial structures; nano-imprint lithography; Dry etching; Electrons; Fabrication; Gallium nitride; Light emitting diodes; Lighting control; Liquid crystal displays; Lithography; Photonic crystals; Resists;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    IEEE/LEOS Winter Topicals Meeting Series, 2009
  • Conference_Location
    Innsbruck
  • Print_ISBN
    978-1-4244-2610-2
  • Electronic_ISBN
    978-1-4244-2611-9
  • Type

    conf

  • DOI
    10.1109/LEOSWT.2009.4771652
  • Filename
    4771652
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2576974