DocumentCode
2577066
Title
Photonic crystals in lithium niobate by ion-beam enhanced etching
Author
Hartung, Holger ; Geiss, Reinhard ; Gischkat, Thomas ; Schrempel, Frank ; Iliew, Rumen ; Pertsch, Thomas ; Lederer, Falk ; Wesch, Werner ; Kley, Ernst-Bernhard ; Tünnermann, Andreas
Author_Institution
Inst. of Appl. Phys., Friedrich-Schiller-Univ. Jena, Jena
fYear
2009
fDate
12-14 Jan. 2009
Firstpage
64
Lastpage
65
Abstract
A photonic crystal defect waveguide fabricated in a freestanding LiNbO3 membrane is presented. The three dimensional patterning was done by means of ion-beam enhanced etching.
Keywords
crystal defects; ion beam applications; lithium compounds; membranes; optical fabrication; optical materials; optical waveguides; photonic crystals; sputter etching; LiNbO3; freestanding membrane; ion beam enhanced etching; lithium niobate; photonic crystal defect waveguide; three dimensional patterning; waveguide fabrication; Biomembranes; Crystalline materials; Etching; Lithium niobate; Nonlinear optics; Optical harmonic generation; Optical waveguides; Periodic structures; Photonic band gap; Photonic crystals;
fLanguage
English
Publisher
ieee
Conference_Titel
IEEE/LEOS Winter Topicals Meeting Series, 2009
Conference_Location
Innsbruck
Print_ISBN
978-1-4244-2610-2
Electronic_ISBN
978-1-4244-2611-9
Type
conf
DOI
10.1109/LEOSWT.2009.4771656
Filename
4771656
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