High quality factor silicon nitride microdisk resonators for chip-scale visible sensing

Author

Hosseini, Ehsan Shah ; Yegnanarayanan, Siva ; Adibi, Ali

Author_Institution

Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA

fYear

2009

fDate

12-14 Jan. 2009

Firstpage

87

Lastpage

88

Abstract

Ultra-high-quality (Q>4times10⁶) microdisk resonators are demonstrated in a Si₃N₄ platform at 655 nm with straight and curved in-plane coupling waveguides. Selective coupling to specific radial orders and polarizations is demonstrated by phase-matching. TM modes show higher sensitivity to environmental modifications for sensing.

Keywords

Q-factor; light polarisation; micro-optomechanical devices; micromechanical resonators; optical fabrication; optical phase matching; optical planar waveguides; optical resonators; optical sensors; silicon compounds; SiN₃; TM mode; chip-scale visible sensing; curved in-plane coupling waveguide; environmental modification; high-QF silicon nitride microdisk resonator; light polarization; optical phase-matching; specific radial order; wavelength 655 nm; Etching; Optical coupling; Optical frequency conversion; Optical materials; Optical refraction; Optical resonators; Optical sensors; Optical waveguides; Q factor; Silicon; (130.3120) Integrated optics devices; (230.5750) Resonators;

fLanguage

English

Publisher

ieee

Conference_Titel

IEEE/LEOS Winter Topicals Meeting Series, 2009

Conference_Location

Innsbruck

Print_ISBN

978-1-4244-2610-2

Electronic_ISBN

978-1-4244-2611-9

Type

conf

DOI

10.1109/LEOSWT.2009.4771669

Filename

4771669