MEMS based transducers for boundary layer control

Author

Kumar, S.M. ; Reynolds, W.C. ; Kenny, T.W.

Author_Institution

Dept. of Mech. Eng., Stanford Univ., CA, USA

fYear

1999

fDate

21-21 Jan. 1999

Firstpage

135

Lastpage

140

Abstract

Recent experiments and simulations have demonstrated the feasibility of active boundary layer control in turbulent flows. Reduction of skin friction drag requires the development of sensors, actuators and control algorithms to favorably modify the velocity profile close to the wall. This paper describes the fabrication and characterization of modular arrays of actuators and sensors designed for low speed boundary layer flows. These transducers provide an experimental testbed for the evaluation and development of control strategies in a controlled environment.

Keywords

boundary layer turbulence; drag reduction; etching; flow control; microactuators; micromachining; microsensors; piezoelectric actuators; vortices; MEMS based transducers; active boundary layer control; anisotropic etch; control algorithms; controlled environment; hot film sensor arrays; hybrid fabrication process; low speed boundary layer flows; micromachining; modular arrays of actuators; modular arrays of sensors; piezo elements; robust actuation technology; skin friction drag reduction; turbulent flows; velocity profile modification; wall shear stress; zero mass flux vortex generators; Actuators; Fabrication; Friction; Micromechanical devices; Sensor arrays; Sensor phenomena and characterization; Skin; Testing; Transducers; Velocity control;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1999. MEMS '99. Twelfth IEEE International Conference on

Conference_Location

Orlando, FL, USA

ISSN

1084-6999

Print_ISBN

0-7803-5194-0

Type

conf

DOI

10.1109/MEMSYS.1999.746790

Filename

746790