PZT thin-film actuator driven micro optical scanning sensor by 3D integration of optical and mechanical devices

In this paper, a novel functional element integration method is proposed and demonstrated by highly miniaturized micro optical scanning sensor with dimensions of W2.0/spl times/L4.0/spl times/H2.8 mm/sup 3/. In the sensor as small as a wheat grain, the functional elements such as a laser diode (LD), photo detectors (PDs), a beam splitter, a ball lens, and a PZT thin-film actuator integrated optical scanner are integrated on separate substrates each consisting a functional module and the substrates are stacked. And the sensor is capable of multi-optical sensing: the 2D object shape recognition (+/- 10 degs scanning area for two direction) and the range measurement (50 mm +/- 10 mm with 0.5 mm resolution).