Prototype microrobots for micro positioning in a manufacturing process and micro unmanned vehicles

The design and performance of two prototype microrobots are presented in this paper. The microrobots were implemented by surface micromachining arrays of 270 /spl mu/m long, polycrystalline silicon legs across the surface of a silicon chip. The method of motion of the microrobots is designed to mimic the way six legged insects walk. One microrobot leg design has two degrees-of-freedom motion, and the other leg design has one degree-of-freedom motion. Both microrobot designs are able to transport objects across their bellies while lying on their backs. The microrobot with one degree-of-freedom motion is able to support several times its own weight, making available the option to carry an autonomous power supply (such as a solar cell), microprocessor, control circuitry, test equipment, and sensing or surveillance devices.