Nano-technology in silicon foundries

Foundry has been quietly manufacturing VLSI products based on today´s nano-scale transistors. Further scaling is becoming more and more challenging. There are lots of opportunities to collaborate between academia and Foundry to push the frontier nano-science research, so that more options become available to future scaling. New, none-IC materials and structures are being exploited for the continuation of scaling and new functions. Among these, a successful marriage of Si electronic devices and spintronics can bring in a new kind of memory device previously not available. It has been about 30 years of exciting evolution. It is expected that the next 30 years will be more exciting.