• DocumentCode
    2581305
  • Title

    Electrostatic inkjet head fabricated by anodization of Si

  • Author

    Ishida, Yuji ; Matsuzaki, Kazunari ; Baba, Akiyoshi ; Asano, Tanemasa

  • Author_Institution
    Kitakyushu Found. for the Adv. of Ind. Sci. & Technol., Japan
  • fYear
    2003
  • fDate
    29-31 Oct. 2003
  • Firstpage
    302
  • Lastpage
    303
  • Abstract
    In this paper, we successfully fabricated the cone-shaped electrostatic inkjet head using anodization and demonstrated the droplet ejection from this head. The dot size was about 50 /spl mu/m in diameter and this value is much larger than that of expected. Optimization of head shape and driving method will enable us to obtain fine droplets.
  • Keywords
    anodisation; electrostatic devices; elemental semiconductors; silicon; 50 micron; Si; anodization; cone-shaped electrostatic inkjet head; droplet ejection; droplets; Annealing; Bonding; Conductivity; Electrodes; Electrostatics; Fabrication; Hafnium; Head; Ink; Materials science and technology;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology Conference, 2003. Digest of Papers. 2003 International
  • Conference_Location
    Tokyo, Japan
  • Print_ISBN
    4-89114-040-2
  • Type

    conf

  • DOI
    10.1109/IMNC.2003.1268766
  • Filename
    1268766
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2581305