60GHz-band low loss on-chip band pass filter with patterned ground shields for millimeter wave CMOS SoC

This paper presents a design of an improved on-chip open loop resonator band pass filter (OLR-BPF) for 60 GHz millimeter-wave applications in 0.18 μm CMOS technology. The proposed on-chip BPF employs the folded open loop structure on patterned ground shields. The adoption of a folded structure for the OLR-BPF and utilization of two transmissions zero permits a compact size and high selectivity for the BPF. In addition, the patterned ground shields obviously slowed down the guided waves, which enables a further reduction of the physical length of the resonator and finally an improvement of the insertion loss of the BPF. By comparison between the electromagnetic (EM) simulations and measurement results, the proposed BPF has the center frequency of 59 GHz, insertion loss 2.77 dB, band width 14 GHz, return loss is less than 27.5 dB, and chip size 910×650 μm² (including bonding pads).