A terahertz on-chip Frequency-Selective Surface integrated with temperature-sensing circuits in 0.18-µm foundry CMOS process

Author

Su, Li ; Yang, Sin-Han ; Huang, I-Chun ; Tzuang, Ching-Kuang C.

Author_Institution

Grad. Inst. of Commun. Eng., Nat. Taiwan Univ., Taipei, Taiwan

fYear

2011

fDate

5-10 June 2011

Firstpage

1

Lastpage

4

Abstract

An on-chip Frequency-Selective-Surface (FSS) integrated with a Proportional-to-Absolute-Temperature (PTAT) circuit for detecting infrared wave in CMOS process is presented. The slot-type FSSs with different slot length reveal different transmission properties. The power absorbed by the chip is analyzed by electromagnetic and thermal simulation software. The measurement results at 28.3 THz show good trends with simulation. The influence of the CMOS material properties is also investigated.

Keywords

CMOS integrated circuits; MMIC; frequency selective surfaces; temperature sensors; electromagnetic simulation software; foundry CMOS process; frequency 28.3 THz; infrared wave detection; material properties; proportional-to-absolute-temperature circuit; size 0.18 mum; slot length; slot-type FSS; temperature-sensing circuits; terahertz on-chip frequency-selective surface; thermal simulation software; transmission properties; CMOS integrated circuits; Frequency selective surfaces; Integrated circuit modeling; Semiconductor device measurement; Semiconductor device modeling; System-on-a-chip; Temperature measurement; CMOS integrated circuits; detectors; frequency-selective surfaces; infrared; terahertz;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest (MTT), 2011 IEEE MTT-S International

Conference_Location

Baltimore, MD

ISSN

0149-645X

Print_ISBN

978-1-61284-754-2

Electronic_ISBN

0149-645X

Type

conf

DOI

10.1109/MWSYM.2011.5972800

Filename

5972800