• DocumentCode
    2586658
  • Title

    Alumina and LTCC Technology for RF MEMS Switches and True Time Delay Lines

  • Author

    Buttiglione, Roberta ; Catoni, Simone ; De Angelis, Giorgio ; Dispenza, Massimiliano ; Fiorello, Annamaria ; Kautio, Kari ; Ladhes, Manu ; Marcelli, Romolo ; Ronka, Kari

  • Author_Institution
    SELEX-SI, Roma
  • fYear
    2008
  • fDate
    27-28 Oct. 2008
  • Firstpage
    366
  • Lastpage
    369
  • Abstract
    The technology for the realization of RF MEMS ohmic series switches on LTCC substrates has been set up for their implementation in true time delay line configurations. Alumina and LTCC structures for validating the technological process on the individual switches have been obtained and characterized. Static delay lines on LTCC have been manufactured and tested to get the expected electrical performances for the final configuration.
  • Keywords
    alumina; ceramics; delay lines; microswitches; Al2O3; LTCC substrates; RF MEMS switches; alumina; static delay lines; true time delay line; Biomembranes; Delay effects; Etching; Ferroelectric materials; Gold; Lithography; Performance evaluation; Radiofrequency microelectromechanical systems; Switches; Thermal conductivity;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Integrated Circuit Conference, 2008. EuMIC 2008. European
  • Conference_Location
    Amsterdam
  • Print_ISBN
    978-2-87487-007-1
  • Type

    conf

  • DOI
    10.1109/EMICC.2008.4772305
  • Filename
    4772305
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2586658