• DocumentCode
    2588963
  • Title

    Highly scalable and CMOS-compatible STTM cell technology

  • Author

    Ahn, S.J. ; Koh, G.H. ; Kwon, K.W. ; Baik, S.J. ; Jung, G.T. ; Hwang, Y.N. ; Jeong, H.S. ; Kinam Kim

  • Author_Institution
    Adv. Technol. Dev., Samsung Electron. Co.Ltd., Kyunggi-Do, South Korea
  • fYear
    2003
  • fDate
    8-10 Dec. 2003
  • Abstract
    The technological challenges associated with STTM (scalable two transistor memory) cells were reviewed. First of all, the basic operating principles of the memory cell are discussed. This is followed by the introduction of the memory array formation and co-process of the I/O transistor, applying a 0.24 /spl mu/m design rule test vehicle. A new cell structure of a surrounded gate STTM structure is introduced. In addition, the process technology and the performance of the memory cell are presented.
  • Keywords
    CMOS memory circuits; 0.24 micron; CMOS-compatible STTM cell technology; I/O transistor co-process; highly scalable memory cell technology; memory array formation; scalable two transistor memory; surrounded gate STTM structure; Boron; CMOS technology; Electrons; Flash memory; Random access memory; Research and development; Testing; Threshold voltage; Transistors; Writing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International
  • Conference_Location
    Washington, DC, USA
  • Print_ISBN
    0-7803-7872-5
  • Type

    conf

  • DOI
    10.1109/IEDM.2003.1269275
  • Filename
    1269275