DocumentCode
2589378
Title
RF MEMS and its Applications in Microwaves and Millimeter Waves
Author
Zhu, Shouzheng
Author_Institution
Dept. of EE., East China Normal Univ., Shanghai
fYear
2008
fDate
10-12 Sept. 2008
Firstpage
407
Lastpage
410
Abstract
RF MEMS devices utilized micromachining technologies offer a high performance to several RF applications. They receive increasingly attentions in microwave researchers and engineers in the recent years. This paper includes two parts. In the first part, a brief review of RF MEMS is presented. In the second part, some research work of the author´s group on RF MEMS technology is introduced.
Keywords
micromachining; micromechanical devices; microwave devices; millimetre wave devices; RF MEMS technology; micromachining technologies; microwave wave; millimeter waves; Manufacturing; Micromachining; Micromechanical devices; Microswitches; Microwave devices; Millimeter wave technology; Phase shifters; Radio frequency; Radiofrequency microelectromechanical systems; Switches;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 2008 China-Japan Joint
Conference_Location
Shanghai
Print_ISBN
978-1-4244-3821-1
Type
conf
DOI
10.1109/CJMW.2008.4772456
Filename
4772456
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