Thousands of microcantilevers for highly parallel and ultra-dense data storage

Ultrahigh storage densities of up to 1 Tb/in./sup 2/ or more can be achieved by using local-probe techniques to write, read back, and erase data in very thin polymer films. The thermomechanical scanning-probe-based data-storage concept, internally dubbed "millipede", combines ultrahigh density, small form factor, and high data rates. High data rates are achieved by parallel operation of large 2D arrays with thousands micro/nanomechanical cantilevers/tips that can be batch-fabricated by silicon surface-micromachining techniques. The inherent parallelism, the ultrahigh areal densities and the small form factor may open up new perspectives and opportunities for application in areas beyond those envisaged today.