The detection of DNA using a silicon nanopore

Author

Heng, J.B. ; Dimitrov, V. ; Grinkova, Y.V. ; Ho, C. ; Kim, T. ; Muller, Dirk ; Sligar, S. ; Sorsch, T. ; Twesten, R. ; Timp, R. ; Timp, G.

Author_Institution

Micro & Nanotechnol. Lab., Illinois Univ., Urbana, IL, USA

fYear

2003

fDate

8-10 Dec. 2003

Abstract

We have developed a novel strategy for producing nanopores in inorganic, CMOS-compatible membranes using a tightly focused, high energy electron beam. We are able to characterize the nanopores physically (TEM, AFM) as well as electrically (ionic conductivity and "wetting" curves). Subsequently, we used the nanopore as a molecular Coulter counter to detect the size of a DNA molecule. This is the first report of the use of an inorganic nanopore for discriminating DNA molecules.

Keywords

DNA; biosensors; elemental semiconductors; ionic conductivity; membranes; nanoporous materials; porous semiconductors; silicon; size measurement; AFM; DNA detection; DNA molecule size detection; Si; TEM; high energy electron beam; inorganic CMOS-compatible membranes; ionic conductivity; molecular Coulter counter; silicon nanopore; tightly focused electron beam; wetting curves; Biomembranes; Cells (biology); Conductivity; DNA; Electron beams; Lipidomics; Nanoporous materials; Proteins; Silicon; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International

Conference_Location

Washington, DC, USA

Print_ISBN

0-7803-7872-5

Type

conf

DOI

10.1109/IEDM.2003.1269393

Filename

1269393