DocumentCode
2591190
Title
9 MHz Vibrating Body FET tuning fork oscillator
Author
Grogg, Daniel ; Conte, Fabrizio Lo ; Kayal, Maher ; Ionescu, Adrian Mihai
Author_Institution
Nanoelectronic Devices Lab., Ecole Polytech. Fed. de Lausanne (EPFL), Lausanne, Switzerland
fYear
2009
fDate
20-24 April 2009
Firstpage
520
Lastpage
523
Abstract
A 9.4 MHz micro-electromechanical oscillator based on a Vibrating Body Field Effect Transistor (VB-FET) is presented in this work. The tuning fork VB-FET used in this work provides a high quality factor of 9400 in the open-loop configuration and a low equivalent resistance. This performance makes the VB-FET an interesting candidate for fully integrated oscillator. An oscillator based on the tuning fork VB-FET is characterized.
Keywords
field effect transistors; oscillators; vibrations; FET tuning fork oscillator; frequency 9 MHz; micro-electromechanical oscillator; open loop configuration; vibrating body field effect transistor; Body regions; FETs; Laboratories; Nanoscale devices; Optical modulation; Oscillators; Q factor; Scanning electron microscopy; Shape; Vibrations; MEMS; Phase Noise; Resonator; Transistor; Tunable Oscillator; Tuning Fork;
fLanguage
English
Publisher
ieee
Conference_Titel
Frequency Control Symposium, 2009 Joint with the 22nd European Frequency and Time forum. IEEE International
Conference_Location
Besancon
ISSN
1075-6787
Print_ISBN
978-1-4244-3511-1
Electronic_ISBN
1075-6787
Type
conf
DOI
10.1109/FREQ.2009.5168235
Filename
5168235
Link To Document