Understanding manufacturing process variation with multi-vari analysis

Author

Bobbitt, Charles E., Jr.

Author_Institution

Motorola Inc., Phoenix, AZ, USA

fYear

1990

fDate

11-12 Sep 1990

Firstpage

137

Lastpage

141

Abstract

A statistical method that allows for simplicity of design and complements other statistical methods called multi-vari analysis (MVA) is described. MVA can be applied to virtually any manufacturing process. The results produced from this type of study give the engineer a good understanding of the manufacturing process. With this technique, engineers can determine manufacturing process capability and decide what steps need to be taken for further process control or improvement. The steps in performing a MVA process characterization study are given. MVA graphing and graph analysis and other uses for MVA data are discussed

Keywords

graph theory; statistical analysis; statistical process control; MVA graphing; characterization study; graph analysis; manufacturing process variation; multi-vari analysis; process capability; process control; statistical method; Instruments; Manufacturing processes; Microassembly; Problem-solving; Process control; Reproducibility of results; Sampling methods; Semiconductor device manufacture; Semiconductor materials; Statistical analysis;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Semiconductor Manufacturing Conference and Workshop, 1990. ASMC 90 Proceedings. IEEE/SEMI 1990

Conference_Location

Danvers, MA

Type

conf

DOI

10.1109/ASMC.1990.111238

Filename

111238