DocumentCode
2593101
Title
Polymer microfabrication applied to assembly and connection problems
Author
Ryan, T.G.
Author_Institution
Epigem Ltd., Middlesbrough, UK
fYear
1997
fDate
35487
Firstpage
42491
Lastpage
42492
Abstract
This paper will describe the wide range of polymer microfabrication techniques that are now available not only for moulding channels (and surface reliefs in general) but also for filling the reliefs with the range of materials required to produce microsystems. Examples will be described in which a polymer surface relief has been used to provide an application function, for example, a diffraction grating or a channel waveguide and where the the problems of optical interconnection and assembly have been addressed
Keywords
optical polymers; channel waveguide; diffraction grating; microsystem; moulding; optical assembly; optical interconnection; polymer microfabrication; surface relief;
fLanguage
English
Publisher
iet
Conference_Titel
Assembly and Connections in Microsystems (Digest No. 1997/004), IEE Colloquium on
Conference_Location
London
Type
conf
DOI
10.1049/ic:19970023
Filename
597325
Link To Document