Error compensation and feedforward controller design for a 6-dof micro-positioning platform

Author

Ting, Yung ; Jar, Ho-Chin ; Li, Chun-Chung

Author_Institution

Dept. of Mech. Eng., Chung Yuan Christian Univ., Chung Li, Taiwan

fYear

2005

fDate

2-6 Aug. 2005

Firstpage

942

Lastpage

947

Abstract

In this article, hysteresis controller design and static error compensation method for a 6-dof micro-positioning platform driven by piezoelectric actuator is studied. The nonlinear hysteresis effect of the piezoelectric actuator is analyzed by means of Preisach model. Its inverse model is used as the feedforward controller. Error compensation method is designed to compensate the manufacture error and assembly error by use of the developed 3-points-3-axes measurement method. From practical experiment, the proposed method makes improvement on the accuracy of positioning.

Keywords

control system synthesis; end effectors; error compensation; feedforward; hysteresis; inverse problems; micropositioning; piezoelectric actuators; Preisach model; feedforward controller design; hysteresis controller design; inverse model; micropositioning platform; nonlinear hysteresis; piezoelectric actuator; static error compensation; Assembly; Biomedical measurements; Error compensation; Hysteresis; Inverse problems; Kinematics; Manufacturing; Piezoelectric actuators; Piezoelectric materials; Precision engineering; 6-dof platform; error compensation; hysteresis modeling; piezoelectric actuators;

fLanguage

English

Publisher

ieee

Conference_Titel

Intelligent Robots and Systems, 2005. (IROS 2005). 2005 IEEE/RSJ International Conference on

Print_ISBN

0-7803-8912-3

Type

conf

DOI

10.1109/IROS.2005.1545073

Filename

1545073