• DocumentCode
    2597105
  • Title

    Surface activated bonding of Si/Ce:YIG for waveguide optical isolators

  • Author

    Shoji, Yuya ; Ito, Masatoshi ; Shirato, Yuya ; Mizumoto, Tetsuya

  • Author_Institution
    Dept. of Electr. & Electron. Eng., Tokyo Inst. of Technol., Tokyo, Japan
  • fYear
    2012
  • fDate
    22-23 May 2012
  • Firstpage
    95
  • Lastpage
    95
  • Abstract
    We investigate surface activated bonding of magneto-optic garnet, Ce:YIG on silicon for waveguide optical isolators. An interlayer between Si and Ce:YIG can reduce nonreciprocal phase shift. We achieve direct bonding of Si/Ce:YIG with N2 plasma to obtain efficient nonreciprocal phase shift, and fabricate a waveguide optical isolator with Si-wire waveguides.
  • Keywords
    adhesive bonding; cerium; elemental semiconductors; garnets; integrated optics; magneto-optical isolators; optical fabrication; optical phase shifters; optical waveguides; plasma materials processing; silicon; yttrium compounds; N2 plasma; Si-wire waveguides; YIG:Ce-Si; direct bonding; interlayer; magneto-optic garnet; nonreciprocal phase shift; surface activated bonding; waveguide optical isolators; Bonding; Isolators; Magnetooptic effects; Optical device fabrication; Optical waveguides; Plasmas; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Low Temperature Bonding for 3D Integration (LTB-3D), 2012 3rd IEEE International Workshop on
  • Conference_Location
    Tokyo
  • Print_ISBN
    978-1-4673-0743-7
  • Type

    conf

  • DOI
    10.1109/LTB-3D.2012.6238059
  • Filename
    6238059
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2597105