Low-loss and compact millimeter-wave balun on Si

Summary form only given, as follows. We designed and fabricated low-loss and compact microstrip line and Marchand balun composed of thick Cu and thick resin on Si substrate for millimeter-wave applications. An attenuation constant and Q of the fabricated microstrip line are 0.17 dB/mm and 52 at 60GHz, respectively. The insertion loss and the core size of the fabricated balun are 0.6 dB at 60 GHz and 300 um × 450 um, respectively, which, to our knowledge, are the lowest and the smallest among the millimeter-wave baluns ever reported.