DocumentCode
2597235
Title
Saturn - A Device Engineer´s Tool For Optimizing Mosfet Performance And Lifetime
Author
Jacobs, H. ; Hinsch, W. ; Hofmann, F. ; Jacobs, W. ; Paffrath, M. ; Rank, E. ; Steger, K. ; Weinert, U.
Author_Institution
Silicon Process Technology
fYear
1990
fDate
3-4 Jun 1990
Firstpage
55
Lastpage
56
Keywords
Circuit simulation; Design optimization; Doping profiles; Jacobian matrices; Leakage current; MOSFET circuits; Research and development; Saturn; Silicon; Stability;
fLanguage
English
Publisher
ieee
Conference_Titel
Numerical Modeling of Processes and Devices for Integrated Circuits, 1990. NUPAD III. 1990 Workshop on
Type
conf
DOI
10.1109/NUPAD.1990.748274
Filename
748274
Link To Document