Some design issues of piezoelectric resonating structure for cooling of microelectronic components

Static, model and harmonic analysis of bimetallic beam called bimorph has been performed using commercial finite element analysis software package, ANSYS. The effect of damping ratio, temperature and applied electric field on the vibration characteristics of the beam has been studied. It is noted that as the damping ratio increases, the dynamic tip-deflection reduces. On increasing the temperature, first ultrasonic resonance frequency increase first then decrease. Dynamic tip-deflection increases as temperature increases. The tip-deflection is directly proportional to the applied electric field. The results are in good agreement with the literature.