• DocumentCode
    2598628
  • Title

    Progress in all-solid-state deep-ultraviolet lasers

  • Author

    Oka, Michio ; Masuda, Hisashi ; Kikuchi, Hiroki ; Kubota, Shigeo

  • Author_Institution
    Res. Center, Sony Corp., Tokyo, Japan
  • Volume
    2
  • fYear
    1996
  • fDate
    18-21 Nov 1996
  • Firstpage
    358
  • Abstract
    High power deep ultraviolet (UV) radiation has attracted much attention in areas such as photo-lithography. We report progress in improving the quality of Czochralski-grown β-BaB2O4 (BBO) which is essential for generating high average output power in the deep ultraviolet regime. In order to evaluate our CZ grown BBO, a flash-lamp pumped Q-switched Nd:YAG laser (Quantel YG-682S) was employed
  • Keywords
    Q-switching; barium compounds; crystal growth from melt; flash lamps; neodymium; optical pumping; photolithography; solid lasers; β-BaB2O4; BaB2O4; CZ grown BBO; Czochralski-grown; Quantel YG-682S; YAG:Nd; YAl5O12:Nd; all-solid-state deep-ultraviolet lasers; deep UV radiation; flash-lamp pumped Q-switched Nd:YAG laser; high average output power; photo-lithography; Coatings; Crystals; Diodes; Frequency; Laser noise; Light sources; Lithography; Optical pumping; Optical scattering; Resonance;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Society Annual Meeting, 1996. LEOS 96., IEEE
  • Conference_Location
    Boston, MA
  • Print_ISBN
    0-7803-3160-5
  • Type

    conf

  • DOI
    10.1109/LEOS.1996.571923
  • Filename
    571923
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2598628