DocumentCode
2602552
Title
Durability and Stability of Various Insulating Films Against the High Temperature Water in an Autoclave
Author
Sato, J. ; Ban, Y. ; Maeda, K.
Author_Institution
ICs Engineering Department, FUJITSU Ltd., Kawasaki, Japan
fYear
1971
fDate
25993
Firstpage
96
Lastpage
106
Abstract
We have investigated the reliability of various electronic devices and materials in high temperature water and moisture using an autoclave currently used for the reliability tests in several fields. It appears that there are different types of corrosion and instability phenomena among various insulating fillns on silicon. Reliability problems of Silicon Nitride (Si3N4), of Silicon Dioxide (SiO2) and of other films will be discussed.
Keywords
Corrosion; Electronic equipment testing; Insulation; Materials reliability; Materials testing; Moisture; Semiconductor films; Silicon compounds; Stability; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium, 1971. 9th Annual
Conference_Location
Las Vegas, NV, USA
ISSN
0735-0791
Type
conf
DOI
10.1109/IRPS.1971.362500
Filename
4207869
Link To Document