DocumentCode
2603305
Title
Electromigration of TiPdAu Conductors
Author
Pitetti, R.C.
Author_Institution
Bell Telephone Laboratories Incorporated, 555 Union Blvd., Allentown, Pennsylvania, 18103
fYear
1972
fDate
26390
Firstpage
171
Lastpage
174
Abstract
Electromigration is a momentum transfer process which can cause electrical opens in conductors. The seriousness of this problem increases as the conductor line width and thickness decreases leading to increases in current densities. There has been much data reported on aluminum conductors, but very little work has been reported on gold metal-lizations. The object of this work was to determine the lifetimes of gold conductors defined into realistic geometries. Two different test patterns were used: One was the collector to ground conductor in an experimental oscillator having line widths ranging from 2 to 5 mils. The second pattern used was a straight line pattern 125 mils long and 2 mils wide. These conductors were tested using glass, glazed ceramic and partially glazed ceramic substrates.
Keywords
Aluminum; Ceramics; Conductors; Current density; Electromigration; Geometry; Glass; Gold; Oscillators; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium, 1972. 10th Annual
Conference_Location
Las Vegas, NV, USA
ISSN
0735-0791
Type
conf
DOI
10.1109/IRPS.1972.362547
Filename
4207919
Link To Document