A single-ended CMOS sensing circuit for MEMS gyroscope with noise cancellation

Author

Elsayed, Mohannad ; Emira, Ahmed ; Sedky, Sherif ; Habib, S.E.-D.

Author_Institution

Fac. of Eng., Cairo Univ., Cairo, Egypt

fYear

2010

fDate

20-23 June 2010

Firstpage

385

Lastpage

388

Abstract

In this work, a complete single-ended readout circuit for capacitive MEMS gyroscope using chopper stabilization technique is presented. A novel noise cancellation technique is used to get rid of the bias noise. The circuit offers superior performance over state of the art readout circuits in terms of cost, gain, and noise for the given area and power consumption. The full circuit exhibits a gain of 58dB, a power dissipation of 1.3mW and an input referred noise of 12nV/√Hz. This would significantly improve the overall sensitivity of the gyroscope. The full circuit has been fabricated in 0.6μm CMOS technology and it occupies an area of 0.4mm × 1mm.

Keywords

CMOS integrated circuits; capacitive sensors; choppers (circuits); gyroscopes; interference suppression; microsensors; CMOS sensing circuit; MEMS; capacitive sensor; chopper stabilization technique; gain 58 dB; gyroscope; noise cancellation technique; power 1.3 mW; size 0.6 mum; CMOS integrated circuits; Capacitance; Gyroscopes; Micromechanical devices; Mixers; Noise; Sensors; Gyroscope; MEMS; capacitive sensing; chopper stabilization; interface circuits;

fLanguage

English

Publisher

ieee

Conference_Titel

NEWCAS Conference (NEWCAS), 2010 8th IEEE International

Conference_Location

Montreal, QC

Print_ISBN

978-1-4244-6806-5

Electronic_ISBN

978-1-4244-6804-1

Type

conf

DOI

10.1109/NEWCAS.2010.5603997

Filename

5603997