DocumentCode
2605539
Title
Electromigration Failure in Au Thin-Film Conductors
Author
Agarwala, Birendra N.
Author_Institution
International Business Machines Corp., Poughkeepsie, N. Y. 12602
fYear
1975
fDate
27485
Firstpage
107
Lastpage
112
Abstract
Experiments are carried out to understand the electromigration-induced failure mechanism in thin-film Au conductors. The activation energy for the atom transport and the magnitude of the current exponent In the failure equation are obtained. The role of surface coverage on the reliability of AU stripes is studied. The underlying mode of atom transport and the possible sources of flux divergences are discussed in terms of these results.
Keywords
Atomic measurements; Conductive films; Conductors; Current density; Electromigration; Equations; Gold; Substrates; Temperature distribution; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium, 1975. 13th Annual
Conference_Location
Las Vegas, NV, USA
ISSN
0735-0791
Type
conf
DOI
10.1109/IRPS.1975.362683
Filename
4208064
Link To Document