• DocumentCode
    2606059
  • Title

    Electrostatic micromanipulation of a conductive/dielectric particle by a single probe

  • Author

    Saito, Shigeki ; Sonoda, Masaki ; Ochiai, Toshihiro ; Han, Min ; Takahashi, Kunio

  • Author_Institution
    Dept. Mech. & Aerosp. Eng., Tokyo Inst. of Technol., Tokyo
  • fYear
    2007
  • fDate
    2-5 Aug. 2007
  • Firstpage
    733
  • Lastpage
    736
  • Abstract
    This study reports the possibility of electrostatic micromanipulation of a conductive/dielectric particle using a single probe. The manipulation system consists of three objects: a conductive probe as a manipulating tool, a conductive plate as a substrate, and a conductive/dielectric particle that dubs as a micro-particle. For a conductive particle, a micromanipulation technique by applying accelerating and decelerating voltage with high switching rate is developed. We theoretically determine the desired voltage as the function of time by boundary element method, and experimentally verify the voltage effectively works with a 30-micrometer-in-diameter solder particle. For a dielectric particle, we experimentally demonstrate the successful picking-up of a 60-micrometer-in-diameter dielectric particle (phenol, polystyrene) from the substrate by electrostatic force. Besides, especially for a polystyrene particle, we observe the phenomenon of a micro-particle going back and forth between the substrate and the probe-tip like a micro-dribble even when just the constant voltage is applied. We discuss the possible mechanism of this interesting phenomenon and the feasibility of electrostatic manipulation for a dielectric micro-particle.
  • Keywords
    boundary-elements methods; micromanipulators; polymers; accelerating voltage; boundary element method; conductive particle; decelerating voltage; dielectric particle; electrostatic micromanipulation; phenol; polystyrene; switching rate; Acceleration; Adhesives; Boundary element methods; Dielectric materials; Dielectric substrates; Electrostatics; Nanotechnology; Optical microscopy; Probes; Voltage; adhesion; condutive; dielectric; electrostatic; micromanipulation; particle;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology, 2007. IEEE-NANO 2007. 7th IEEE Conference on
  • Conference_Location
    Hong Kong
  • Print_ISBN
    978-1-4244-0607-4
  • Electronic_ISBN
    978-1-4244-0608-1
  • Type

    conf

  • DOI
    10.1109/NANO.2007.4601292
  • Filename
    4601292