DocumentCode
2606059
Title
Electrostatic micromanipulation of a conductive/dielectric particle by a single probe
Author
Saito, Shigeki ; Sonoda, Masaki ; Ochiai, Toshihiro ; Han, Min ; Takahashi, Kunio
Author_Institution
Dept. Mech. & Aerosp. Eng., Tokyo Inst. of Technol., Tokyo
fYear
2007
fDate
2-5 Aug. 2007
Firstpage
733
Lastpage
736
Abstract
This study reports the possibility of electrostatic micromanipulation of a conductive/dielectric particle using a single probe. The manipulation system consists of three objects: a conductive probe as a manipulating tool, a conductive plate as a substrate, and a conductive/dielectric particle that dubs as a micro-particle. For a conductive particle, a micromanipulation technique by applying accelerating and decelerating voltage with high switching rate is developed. We theoretically determine the desired voltage as the function of time by boundary element method, and experimentally verify the voltage effectively works with a 30-micrometer-in-diameter solder particle. For a dielectric particle, we experimentally demonstrate the successful picking-up of a 60-micrometer-in-diameter dielectric particle (phenol, polystyrene) from the substrate by electrostatic force. Besides, especially for a polystyrene particle, we observe the phenomenon of a micro-particle going back and forth between the substrate and the probe-tip like a micro-dribble even when just the constant voltage is applied. We discuss the possible mechanism of this interesting phenomenon and the feasibility of electrostatic manipulation for a dielectric micro-particle.
Keywords
boundary-elements methods; micromanipulators; polymers; accelerating voltage; boundary element method; conductive particle; decelerating voltage; dielectric particle; electrostatic micromanipulation; phenol; polystyrene; switching rate; Acceleration; Adhesives; Boundary element methods; Dielectric materials; Dielectric substrates; Electrostatics; Nanotechnology; Optical microscopy; Probes; Voltage; adhesion; condutive; dielectric; electrostatic; micromanipulation; particle;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology, 2007. IEEE-NANO 2007. 7th IEEE Conference on
Conference_Location
Hong Kong
Print_ISBN
978-1-4244-0607-4
Electronic_ISBN
978-1-4244-0608-1
Type
conf
DOI
10.1109/NANO.2007.4601292
Filename
4601292
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