DocumentCode
2606593
Title
Simulation of spectroscopic ellipsometry for dielectric lamellar gratings
Author
Watanabe, K. ; Pistora, J. ; Foldyna, Martin ; Postava, K. ; Vlcek, Jaroslav
Author_Institution
Department of Information and Communication Engineering, Fukuoka Institute of Technology, 3-30-1 Wajirohigashi, Higashi-h, Fukuoka 81 1-0295, Japan
fYear
2004
fDate
14-17 Sept. 2004
Firstpage
501
Lastpage
503
Abstract
Spectroscopic ellipsometry for lamellar gratings made of lossless dielectric materials is numerically investigated by using the rigorous coupled-wave formulation based on Li??s Fourier factorization rules. Accurate values of the ellipsometric angles are obtained with small number of Fourier components, and it is shown that accurate estimation of the grating parameters is possible in reasonable computation time.
Keywords
Dielectric losses; Dielectric materials; Diffraction; Electrochemical impedance spectroscopy; Electromagnetic measurements; Ellipsometry; Geometry; Gratings; Polarization; Wavelength measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Mathematical Methods in Electromagnetic Theory, 2004. 10th International Conference on
Conference_Location
Dniepropetrovsk, Ukraine
Print_ISBN
0-7803-8441-5
Type
conf
DOI
10.1109/MMET.2004.1397097
Filename
1397097
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