DocumentCode

2606689

Title

The Use of High Energy Ion Beams for Surface and Thin Film Analysis

Author

Poate, J.M.

Author_Institution

Bell Laboratories, Murray Hill, New Jersey 07974

fYear

1976

fDate

27851

Firstpage

297

Lastpage

298

Keywords

Atomic measurements; Backscatter; Detectors; Energy resolution; Impurities; Ion beams; Light scattering; Solid state circuits; Transistors; X-ray scattering;

fLanguage

English

Publisher

ieee

Conference_Titel

Reliability Physics Symposium, 1976. 14th Annual

Conference_Location

Las Vegas, NV, USA

ISSN

0735-0791

Type

conf

DOI

10.1109/IRPS.1976.362758

Filename

4208142