Nanogetters for MEMS hermetic packaging

A new getter, we call it nanogetter, based on carbon nanotubes (CNTs) coated Ti films has been developed with the purpose of providing a more efficient material, capable of getting active at high vacuum environment (< 10^-3Torr, molecular state) and low temperature (<400 degC). Because of the large surface area of CNTs and its native gas adsorption ability, dense CNTs growth on silicon substrate is considered to be an effective skeleton structure of the nanogetters. All the tests have demonstrated that surface area of nanogetters do have been increased and the pumping speed is enhanced to large amount compared with some traditional getters, such as St175 of SAES in Italy.